JPH0460547U - - Google Patents
Info
- Publication number
- JPH0460547U JPH0460547U JP10244990U JP10244990U JPH0460547U JP H0460547 U JPH0460547 U JP H0460547U JP 10244990 U JP10244990 U JP 10244990U JP 10244990 U JP10244990 U JP 10244990U JP H0460547 U JPH0460547 U JP H0460547U
- Authority
- JP
- Japan
- Prior art keywords
- hearth
- monitor
- shutter
- vapor deposition
- board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims 4
- 230000008020 evaporation Effects 0.000 claims 3
- 238000001704 evaporation Methods 0.000 claims 3
- 239000000463 material Substances 0.000 claims 3
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000000470 constituent Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10244990U JPH0460547U (en]) | 1990-09-29 | 1990-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10244990U JPH0460547U (en]) | 1990-09-29 | 1990-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0460547U true JPH0460547U (en]) | 1992-05-25 |
Family
ID=31846712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10244990U Pending JPH0460547U (en]) | 1990-09-29 | 1990-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0460547U (en]) |
-
1990
- 1990-09-29 JP JP10244990U patent/JPH0460547U/ja active Pending
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